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Product GENSTAR / 3D

Confocal 3D surface metrology

Use chromatic confocal measurement for steps, protrusions, scratches and film thickness.

Confocal 3D surface metrology
Confocal 3D surface metrology · GENSTAR

PRODUCT OVERVIEW

Product overview

Inspection objects

  • Precision surfaces
  • Reflective components
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01 / INSPECTION

Inspection & measurement

  • Height and surface geometry
  • Step and film-thickness measurement

02 / METHOD

Inspection method

Acquire surface height with a chromatic confocal sensor and scanning stage.

Confirm the configuration and inspection scope for the sample, field of view and production requirements.

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